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The technology makes it possible for an operator
engaged in TFT-LCD production to check defects on the glass substrate,
such as dust, scratches or mura under macro illumination system
and if there is any defect, the operator could inspect more intensively
using microscopic optical devices and store the image and defect
information for next process.
The most conspicuous merit of this
technology is the function of enabling an operator to move the
glass substrate freely in the small confined area for detecting
defects using the joystick interfaced with articulated 6-axis robot
system. For this function, a precision articulated 6-axis robot
is used, in addition to that a holder made of special materials
that can hold over 7 generation large-sized glasses steadily and
minimize vibrations. (Patent Pending, Utility Model: 20-0373105) |
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